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| Atomic layer deposition of metal and metal chalcogenide thin films and nanolaminate composites. | 361 |
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| December 2021 | January 2022 | February 2022 | March 2022 | April 2022 | May 2022 | June 2022 | |
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| Atomic layer deposition of metal and metal chalcogenide thin films and nanolaminate composites. | 24 | 48 | 11 | 4 | 2 | 8 | 6 |
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