Proton Beam Writing

Stegmaier, Alrik

dc.contributor.advisor	Hofsäss, Hans Christian Prof. Dr.
dc.contributor.author	Stegmaier, Alrik
dc.date.accessioned	2022-12-16T17:00:43Z
dc.date.available	2022-12-23T00:50:09Z
dc.date.issued	2022-12-16
dc.identifier.uri	http://resolver.sub.uni-goettingen.de/purl?ediss-11858/14424
dc.identifier.uri	http://dx.doi.org/10.53846/goediss-9620
dc.format.extent	186 Seiten	de
dc.language.iso	eng	de
dc.rights.uri	http://creativecommons.org/licenses/by/4.0/
dc.subject.ddc	530	de
dc.title	Proton Beam Writing	de
dc.type	doctoralThesis	de
dc.contributor.referee	Hofsäss, Hans Christian Prof. Dr.
dc.date.examination	2022-03-29	de
dc.subject.gok	Physik (PPN621336750)	de
dc.description.abstracteng	Proton beam writing (PBW) is a mask-less 3D structuring method that uses a focused, relatively high energy Proton beam, followed by an etching step to create free standing 2D and 3D structures in a large variety of target materials. During the irradiation step, defects are created locally in the target material that influence the etching behavior of the second step. The flexibility, high resolution and ability to perform rapid prototyping of micro-electro-mechanical systems makes PBW an interesting area of investigation. However, producing 3D structures reliably and predictably as well as limited theoretical understanding of many of the complicated aspects of PBW are some of the challenges that PBW faces. This work extends the knowledge of this complicated process in many key areas, including the stopping (slowing down and radiation damage) of fast particles in matter and the etching of the final 3D structures. For this new models are developed, simulations are performed and key experiments are used to test and improve the new approaches. New aspects of the etching process during PBW of Gallium Arsenide are also uncovered and discussed. Further more, progress on many practical aspects of PBW was made. These include ion beam optics optimization, beam-line design, target design and accelerator upgrades to the accelerator facilities in Göttingen. Additionally, new software tools for PBW were also developed and employed successfully.	de
dc.contributor.coReferee	Tilgner, Andreas Prof. Dr.
dc.contributor.thirdReferee	Blöchl, Peter E. Prof. Dr.
dc.subject.eng	Ion Stopping	de
dc.subject.eng	Proton Beam Writing	de
dc.subject.eng	Ion Accelerators	de
dc.subject.eng	Electrochemistry	de
dc.subject.eng	Ab initio simulations	de
dc.subject.eng	Molecular Dynamics	de
dc.subject.eng	MEMS	de
dc.identifier.urn	urn:nbn:de:gbv:7-ediss-14424-2
dc.affiliation.institute	Fakultät für Physik	de
dc.description.embargoed	2022-12-23	de
dc.identifier.ppn	1827750650
dc.notes.confirmationsent	Confirmation sent 2022-12-19T06:15:02	de

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