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Atomic layer deposition of metal and metal chalcogenide thin films and nanolaminate composites.
(Niedersächsische Staats- und Universitätsbibliothek Göttingen, 2018-04-09)
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Schneider, Sven Prof. Dr. (1)
Stalke, Dietmar Prof. Dr. (1)
Date issued2018 (1)Publication typedoctoralThesis (1)