Dokumente Fakultät für Physik (inkl. GAUSS) nach Autor "Auge, Manuel"
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Modification of monolayer-thick semiconductors by ultra-low energy ion implantation
Auge, Manuel (2022-03-08)In this thesis, ultra-low energy (ULE) ion implantation is used to modify 2D materials such as graphene and transition metal dichalcogenides (TMDs). The existing implantation system is improved in two respects. By ...