Browsing Naturwissenschaften, Mathematik und Informatik by Referee "Egner, Alexander Apl. Prof. Dr."
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Elastic and viscoelastic deformation of glass plates by excimer laser induced stresses and patterned silicon suboxide films
(2021-10-28)A mechanically stressed film can cause a bending of the underlying substrate. Usually, the substrate deforms elastically, but in special cases a plastic or viscous deformation can be observed. Such deformations are mostly ...